Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
【発明の名称】プラズマCVD装置
Document Type and Number:
Japanese Patent JPH07118462
Kind Code:
B2
Inventors:
Yukio Kamura
Yoshinori Ishida
Takuya Nishimoto
Application Number:
JP26536687A
Publication Date:
December 18, 1995
Filing Date:
October 22, 1987
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
THE FURUKAW ELECTRIC CO.,LTD.
International Classes:
H01L21/205; H01L21/31; (IPC1-7): H01L21/205
Attorney, Agent or Firm:
Hidetoshi Matsumoto



 
Previous Patent: Method for producing conjugated diene-based polymer and method for producing graft copolymer contain...

Next Patent: ELECTRICALLY INSULATED MATERIAL AND ELECTRIC CABLE USING THE SAME