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Title:
【発明の名称】感光性組成物およびそれを用いるパターン形成方法
Document Type and Number:
Japanese Patent JPH07120044
Kind Code:
B2
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Inventors:
Onishi
Rumiko Horiguchi
Shuji Hayase
Application Number:
JP7110786A
Publication Date:
December 20, 1995
Filing Date:
March 31, 1986
Export Citation:
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Assignee:
Toshiba Corporation
International Classes:
G03C1/72; C08G77/14; C08G77/26; C08G77/48; C08G77/60; C08L83/04; C08L83/06; G03F7/004; G03F7/039; G03F7/075; H01L21/312; (IPC1-7): G03F7/075; G03F7/039; H01L21/312
Domestic Patent References:
JP6080844A
JP6236661A
JP62159141A
Attorney, Agent or Firm:
Hajime Tsukuni



 
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