Title:
【発明の名称】熱処理装置
Document Type and Number:
Japanese Patent JPH0712039
Kind Code:
B2
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Inventors:
Onoda
Kazutoshi Watanabe
Kazutoshi Watanabe
Application Number:
JP14728992A
Publication Date:
February 08, 1995
Filing Date:
June 08, 1992
Export Citation:
Assignee:
Kinmon Manufacturing Co., Ltd.
International Classes:
F16L53/00; H01L21/22; H01L21/31; (IPC1-7): H01L21/31; F16L53/00; H01L21/22
Attorney, Agent or Firm:
Takehiko Suzue
Next Patent: PUMPED STORAGE POWER PLANT