Title:
【発明の名称】レジスト硬化装置
Document Type and Number:
Japanese Patent JPH0740548
Kind Code:
B2
Inventors:
Hiroshi Koike
Toshiharu Kimoto
Toshiharu Kimoto
Application Number:
JP9966487A
Publication Date:
May 01, 1995
Filing Date:
April 24, 1987
Export Citation:
Assignee:
Shibaura Manufacturing Co., Ltd.
International Classes:
H01L21/683; G03F7/00; G03F7/40; H01L21/027; H01L21/30; H01L21/68; (IPC1-7): H01L21/027; H01L21/68
Next Patent: 無結節編網機の開閉弁駆動装置