Title:
【発明の名称】イオン打込装置
Document Type and Number:
Japanese Patent JPH0746591
Kind Code:
B2
Inventors:
Tajima Eiji
Application Number:
JP18673386A
Publication Date:
May 17, 1995
Filing Date:
August 11, 1986
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L21/265; H01J37/317; (IPC1-7): H01J37/317; H01L21/265
Domestic Patent References:
| JP61116744A |
Attorney, Agent or Firm:
Hiroo Nagasaki (1 person outside)
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