Document Type and Number:
Japanese Patent JPH07509057
Kind Code:
A
Application Number:
JP50324994A
Publication Date:
October 05, 1995
Filing Date:
July 08, 1992
Export Citation:
International Classes:
G01J1/02; C12P7/62; G01J5/20; H01L37/02; (IPC1-7): G01J5/20; G01J1/02