Title:
【発明の名称】マクロロジツクアレ-
Document Type and Number:
Japanese Patent JPH0783093
Kind Code:
B2
Inventors:
Kenichi Koyama
Application Number:
JP24365086A
Publication Date:
September 06, 1995
Filing Date:
October 13, 1986
Export Citation:
Assignee:
NEC
International Classes:
H01L27/092; H01L21/82; H01L21/822; H01L21/8238; H01L27/04; H01L27/118; (IPC1-7): H01L27/118; H01L21/82; H01L21/822; H01L27/04
Domestic Patent References:
| JP6150346A | ||||
| JP61100947A | ||||
| JP6135536A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
Next Patent: 半導体基板の製造方法