【発明の名称】光処理装置 - Mitsubishi Electric Corporation

Title:

【発明の名称】光処理装置

Document Type and Number:

Japanese Patent JPH0783950

Kind Code:

B2

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Inventors:

Nobuyuki
Toshinori Yagi
Yasuto Nai
Yoshie Uchiyama
Masaaki Tanaka

Application Number:

JP11479590A

Publication Date:

September 13, 1995

Filing Date:

April 28, 1990

Export Citation:

Assignee:

Mitsubishi Electric Corporation

International Classes:

B23K26/066; G03F7/20; H01L21/768; (IPC1-7): B23K26/06

Domestic Patent References:

JP394989A

Attorney, Agent or Firm:

Mamoru Takada (1 person outside)

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