Title:
【発明の名称】薄膜トランジスタの形成方法
Document Type and Number:
Japanese Patent JPH0828510
Kind Code:
B2
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Inventors:
OOKAWA YASUSHI
YANAI KENICHI
OKI KENICHI
YANAI KENICHI
OKI KENICHI
Application Number:
JP1155587A
Publication Date:
March 21, 1996
Filing Date:
January 20, 1987
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G09F9/30; G02F1/136; G02F1/1368; H01L21/336; H01L27/12; H01L29/78; H01L29/786; (IPC1-7): H01L29/786
Domestic Patent References:
| JP61185724A | ||||
| JP61176157A |
Attorney, Agent or Firm:
Teiichi
Next Patent: DRIVING DEVICE OF LEVEE PLASTERING MACHINE