Title:
【発明の名称】測定装置の製造方法
Document Type and Number:
Japanese Patent JPH08504032
Kind Code:
A
Abstract:
PCT No. PCT/SE93/00393 Sec. 371 Date Mar. 6, 1995 Sec. 102(e) Date Mar. 6, 1995 PCT Filed May 5, 1993 PCT Pub. No. WO93/22644 PCT Pub. Date Nov. 11, 1993The invention concerns a method of manufacturing a measuring device of the Fabry-Perot resonator type. The invention likewise concerns a measuring device manufactured by means of the method. The measuring device is particularly intended for measurement of the pressures inside engine cylinders and comprises a cavity and a first part and a second part, said two parts sandwiching the cavity between them. At least the first part, which consists of silicon, supports a spacer layer of silicon dioxide formed through thermal oxidation. The spacer layer which is partially removed through etching, is joined to the second part using the technique known as direct bonding (SDB).
Inventors:
Engström, Olof
Richard, Hans
Richard, Hans
Application Number:
JP51919393A
Publication Date:
April 30, 1996
Filing Date:
May 05, 1993
Export Citation:
Assignee:
Arbor volvo
International Classes:
G01L9/00; G02B26/00; H01L29/84; (IPC1-7): G01L23/22; G01L9/00; G01L11/02
Attorney, Agent or Firm:
Shusaku Yamamoto