Title:
【発明の名称】気体化合物の貯蔵と送出のシステム
Document Type and Number:
Japanese Patent JPH10503268
Kind Code:
A
Abstract:
A laser system utilizing a fluid as the excitatory medium for stimulated light emission, wherein the fluid is supplied from a sorbent-based fluid storage and dispensing system coupled in fluid-supplying relationship with the laser apparatus. The laser may be an excimer laser utilizing as the laser working fluid a rare gas halide compound such as fluorides and/or chlorides of krypton, xenon and argon, as well as fluorine and/or chlorine per se. The laser system may alternatively be a far infrared gas laser utilizing a gas such as CO2, N2O, CD3OD, CH3OD, CH3OH, CH3NH2, C2H2F2, HCOOH, CD3I, CH3F, and C13H3F. Laser systems of the present invention may be utilized in applications such as materials processing, measurement and inspection, reading, writing, and recording of information, holography, communications, displays, spectroscopy and analytical chemistry, remote sensing, surveying, marking, and alignment, surgical and medical applications, plasma diagnostics, laser weaponry, laser-induced nuclear fusion, isotope enrichment and atomic physics.
Inventors:
Tom Glenn Em
McManus James V
McManus James V
Application Number:
JP51336595A
Publication Date:
March 24, 1998
Filing Date:
October 13, 1995
Export Citation:
Assignee:
Advanced Technology Materials Incorporated
International Classes:
B01D53/04; B01J4/02; B01J20/18; B01J20/20; F17C11/00; (IPC1-7): F17C11/00
Attorney, Agent or Firm:
Yoshihisa Oshida