Title:
【発明の名称】電気運動量輸送式ポンプ
Document Type and Number:
Japanese Patent JPH11506183
Kind Code:
A
Abstract:
The present invention provides a method of forming a fluidtight electrical conduit through a high aspect ratio hole, the method comprising sintering a via ink to form the electrical conduit and to seal the hole.
Inventors:
Zanz, Peter, Jay.
Burton, Charlotte, A.
McBride, Sterling, Yi.
Demars, robert
Burton, Charlotte, A.
McBride, Sterling, Yi.
Demars, robert
Application Number:
JP50040897A
Publication Date:
June 02, 1999
Filing Date:
November 09, 1995
Export Citation:
Assignee:
David Sarnoff Research Center, Inc.
International Classes:
B01F13/00; C04B38/06; B01J4/02; B01J19/00; B01L3/00; B81B3/00; B81C1/00; F04B19/00; F04F99/00; H02N11/00; B01F5/06; C40B40/06; C40B60/14; (IPC1-7): F04F11/00
Attorney, Agent or Firm:
Yoshiki Hasegawa (4 outside)