Document Type and Number:
Japanese Patent JPS4028587
Kind Code:
Y1
Application Number:
JP9911064U
Publication Date:
October 11, 1965
Filing Date:
December 22, 1964
Export Citation:
International Classes:
H01L21/52; H01L21/58; H01L23/04; H01L23/20; H01L29/861; (IPC1-7): H01L21/58; H01L23/04; H01L23/20