Document Type and Number:
Japanese Patent JPS4112821
Kind Code:
Y1
Application Number:
JP5843365U
Publication Date:
June 17, 1966
Filing Date:
July 16, 1965
Export Citation:
International Classes:
H01L21/52; H01L21/58; H01L29/861; (IPC1-7): H01L21/58
Previous Patent: JPH04112820
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