Document Type and Number:
Japanese Patent JPS4214332
Kind Code:
Y1
Application Number:
JP9162864U
Publication Date:
August 16, 1967
Filing Date:
November 26, 1964
Export Citation:
International Classes:
G01R1/067; G01R1/06; G01R27/00; H01L21/66; (IPC1-7): G01R1/06; G01R27/00; H01L21/66
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