Document Type and Number:
Japanese Patent JPS4421068
Kind Code:
Y1
Application Number:
JP9049966U
Publication Date:
September 08, 1969
Filing Date:
September 29, 1966
Export Citation:
International Classes:
H01L21/00; H01L21/18; H01L21/78; H01L29/00; H01L29/06; H01L29/10; H01L29/74; H01L29/86; (IPC1-7): H01L29/74