Document Type and Number:
Japanese Patent JPS4514106
Kind Code:
Y1
Application Number:
JP5294367U
Publication Date:
June 15, 1970
Filing Date:
June 20, 1967
Export Citation:
International Classes:
(IPC1-7): H01L43/06; H01J31/00; H01L21/60; H01L23/48; H01L43/08