Document Type and Number:
Japanese Patent JPS4829768
Kind Code:
U
Application Number:
JP7330171U
Publication Date:
April 12, 1973
Filing Date:
August 16, 1971
Export Citation:
International Classes:
C23C8/06; C30B31/12; F27D11/02; H01L21/22; H05B3/00; H05B7/00; (IPC1-7): H01L21/22; H05B7/00