Document Type and Number:
Japanese Patent JPS4831966
Kind Code:
U
Application Number:
JP7318471U
Publication Date:
April 18, 1973
Filing Date:
August 17, 1971
Export Citation:
International Classes:
H01L21/673; H01L21/02; H01L21/22; H01L21/302; H01L21/306; (IPC1-7): A63B55/00; H01L21/02; H01L21/22; H01L21/302