Document Type and Number:
Japanese Patent JPS4840378
Kind Code:
A
Application Number:
JP7485471A
Publication Date:
June 13, 1973
Filing Date:
September 25, 1971
Export Citation:
International Classes:
H01L23/29; G06K19/077; H01L23/02; H01L23/31; H05K3/28; (IPC1-7): H01L23/02