Document Type and Number:
Japanese Patent JPS4844178
Kind Code:
A
Application Number:
JP10056272A
Publication Date:
June 25, 1973
Filing Date:
October 06, 1972
Export Citation:
International Classes:
H05K3/16; C23C14/34; C23C14/35; C23C14/38; H01J37/34; (IPC1-7): C23C15/00