Document Type and Number:
Japanese Patent JPS4886488
Kind Code:
A
Application Number:
JP1564972A
Publication Date:
November 15, 1973
Filing Date:
February 16, 1972
Export Citation:
International Classes:
H01L47/02; H01L23/12; H01L29/47; H01L29/864; H01L29/872
Domestic Patent References:
| JP37009508A | ||||
| JP41003096A |
Foreign References:
| US3225261A | 1965-12-21 | |||
| US3430115A | 1969-02-25 | |||
| US3074145A | 1963-01-22 |