Document Type and Number:
Japanese Patent JPS4899060
Kind Code:
U
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Application Number:
JP2341972U
Publication Date:
November 22, 1973
Filing Date:
February 28, 1972
Export Citation:
International Classes:
B05D5/06; B05D7/02; C23C18/16; C23C18/31; G09F9/30; H01L23/02; H01L23/04; H01L33/60; (IPC1-7): H01L33/00; B05D5/06; B05D7/02; G09F9/30; H01L23/04