Document Type and Number:
Japanese Patent JPS4924373
Kind Code:
A
Application Number:
JP4052673A
Publication Date:
March 04, 1974
Filing Date:
April 11, 1973
Export Citation:
International Classes:
H01L27/04; H01L21/74; H01L21/762; H01L21/822; H01L29/66; H01L29/8605; (IPC1-7): H01C7/06
Foreign References:
| US3404321A | 1968-10-01 |