Document Type and Number:
Japanese Patent JPS4933579
Kind Code:
A
More Like This:
Application Number:
JP7474172A
Publication Date:
March 28, 1974
Filing Date:
July 26, 1972
Export Citation:
International Classes:
H01L29/73; H01L21/331
Domestic Patent References:
JPS4211925Y1 | 1967-07-05 | |||
JP44007102A | ||||
JP45031129A |