Document Type and Number:
Japanese Patent JPS4934284
Kind Code:
A
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Application Number:
JP7496772A
Publication Date:
March 29, 1974
Filing Date:
July 26, 1972
Export Citation:
International Classes:
G09F9/33; H01L21/205; H01L21/22; H01L33/08; H01L33/14; H01L33/34; H01L33/40