Document Type and Number:
Japanese Patent JPS4942227
Kind Code:
B2
Application Number:
JP6129671A
Publication Date:
November 13, 1974
Filing Date:
August 12, 1971
Export Citation:
International Classes:
C23C2/14; G05D3/00; G05D5/02; (IPC1-7): C23C1/14; G05D3/00