Document Type and Number:
Japanese Patent JPS4949980
Kind Code:
U
More Like This:
Application Number:
JP2519173U
Publication Date:
May 01, 1974
Filing Date:
March 01, 1973
Export Citation:
International Classes:
G01B17/00; G01N29/04; (IPC1-7): G01N29/04; H01L41/10
Domestic Patent References:
JP45018635A |