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Document Type and Number:
Japanese Patent JPS4952979
Kind Code:
A
Abstract:
An apparatus for detecting the presence of inclusions in semiconductor material having a polychromatic light source, a support for a semiconductor body, a light sensing means positioned to operate on light transmitted through the body from the light source, the sensing means including a substrate of the same type of semiconductor materials as the material of the semiconductor body, and having at least a PN junction in the substrate with means to backbias the junction, a means to indicate the relative amounts of light transmitted through the semiconductor body that is sensed by the sensing means.

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Application Number:
JP6997673A
Publication Date:
May 23, 1974
Filing Date:
June 22, 1973
Export Citation:
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International Classes:
H01L21/66; G01N21/95; G01R31/265; (IPC1-7): G01N21/16
Other References:
JOURNAL OF APPLIED PHYSICS
IBM TECHNICAL DISCLOSURE BULLETIN



 
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