Document Type and Number:
Japanese Patent JPS4966061
Kind Code:
A
Abstract:
A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.
Application Number:
JP9934973A
Publication Date:
June 26, 1974
Filing Date:
September 05, 1973
Export Citation:
International Classes:
G01N23/22; H01J37/147; H01J37/22; H01J37/26; H01J37/28; (IPC1-7): G01N23/04
Domestic Patent References:
| JP40007574A |