Document Type and Number:
Japanese Patent JPS4984586
Kind Code:
A
Application Number:
JP12785172A
Publication Date:
August 14, 1974
Filing Date:
December 19, 1972
Export Citation:
International Classes:
H01L21/8234; H01L27/06; H01L27/088; H01L29/78; H01L27/04; (IPC1-7): H01L27/04