Document Type and Number:
Japanese Patent JPS50117011
Kind Code:
A
Abstract:
A means for connecting a vacuum pump to a chamber to be evacuated comprises an outer wall of low gas permeability and a gas sorptive means substantially coextensive with the inner surface of said outer wall.
Application Number:
JP432275A
Publication Date:
September 12, 1975
Filing Date:
January 07, 1975
Export Citation:
International Classes:
F04B37/02; (IPC1-7): F04B37/16