Document Type and Number:
Japanese Patent JPS5013150
Kind Code:
B1
More Like This:
Application Number:
JP11077270A
Publication Date:
May 17, 1975
Filing Date:
December 12, 1970
Export Citation:
International Classes:
C30B33/00; H01L21/304; H01L21/331; H01L29/04; H01L29/73; (IPC1-7): H01L29/04; B01J17/06