Document Type and Number:
Japanese Patent JPS50143551
Kind Code:
U
Application Number:
JP5478774U
Publication Date:
November 27, 1975
Filing Date:
May 14, 1974
Export Citation:
International Classes:
G01R13/00; G01D7/02; G01D7/04; G01D7/08; H01J31/10; (IPC1-7): G01D7/04; G01R13/00; H01J31/10
Foreign References:
| US3428913A | 1969-02-18 | |||
| US3736477A | 1973-05-29 |