Document Type and Number:
Japanese Patent JPS50145095
Kind Code:
A
Application Number:
JP5247674A
Publication Date:
November 21, 1975
Filing Date:
May 11, 1974
Export Citation:
International Classes:
G01N27/12; G01N27/00; H01L49/00; (IPC1-7): G01N27/00; H01L49/00
Domestic Patent References:
| JPS4738840A |
Foreign References:
| US3695848A | 1972-10-03 |