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Document Type and Number:
Japanese Patent JPS5023289
Kind Code:
A
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Application Number:
JP7229573A
Publication Date:
March 12, 1975
Filing Date:
June 28, 1973
Export Citation:
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International Classes:
H01J61/09; G01N21/01; G01N21/31; H01J9/04; H01J17/40



 
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