Document Type and Number:
Japanese Patent JPS5040283
Kind Code:
A
Application Number:
JP8082174A
Publication Date:
April 12, 1975
Filing Date:
July 16, 1974
Export Citation:
International Classes:
H01L21/8234; H01L21/331; H01L27/06; H01L27/088; H01L29/00; H01L29/10; H01L29/423; H01L29/73; H01L29/78; (IPC1-7): H01L29/78; H01L27/04