Document Type and Number:
Japanese Patent JPS5040285
Kind Code:
A
Application Number:
JP9200073A
Publication Date:
April 12, 1975
Filing Date:
August 15, 1973
Export Citation:
International Classes:
H01L47/02; H01L21/60; H01L23/12; H01L23/48; H01L29/864; H01L47/00; (IPC1-7): H01L47/00; H01L29/90; H01L23/12; H01L23/48