Document Type and Number:
Japanese Patent JPS5041468
Kind Code:
U
Application Number:
JP9448373U
Publication Date:
April 26, 1975
Filing Date:
August 11, 1973
Export Citation:
International Classes:
H01L23/48; G01J1/42; G03B7/04; H01L31/02; H01L31/08; (IPC1-7): H01L31/08; G01J1/42; G03B7/04; H01L31/02