Document Type and Number:
Japanese Patent JPS5043883
Kind Code:
A
Application Number:
JP8165774A
Publication Date:
April 19, 1975
Filing Date:
July 16, 1974
Export Citation:
International Classes:
H01J37/30; B26F1/26; H01J37/317; H01L21/265; (IPC1-7): H01L21/265; B26F1/26