Document Type and Number:
Japanese Patent JPS5044388
Kind Code:
Y2
Application Number:
JP5968271U
Publication Date:
December 17, 1975
Filing Date:
July 08, 1971
Export Citation:
International Classes:
F23Q2/16; F23Q2/28; F23Q3/00; F23Q3/01; H01L41/00; (IPC1-7): F23Q3/00