Document Type and Number:
Japanese Patent JPS5047576
Kind Code:
A
Application Number:
JP9808273A
Publication Date:
April 28, 1975
Filing Date:
August 31, 1973
Export Citation:
International Classes:
H01L29/78; H01L21/3205; H01L21/8234; H01L23/52; H01L27/04; H01L27/06; (IPC1-7): H01L29/78; H01L27/04
Domestic Patent References:
| JPS4894377A | 1973-12-05 | |||
| JP45012097A |