Document Type and Number:
Japanese Patent JPS5049981
Kind Code:
A
Application Number:
JP9828973A
Publication Date:
May 06, 1975
Filing Date:
September 03, 1973
Export Citation:
International Classes:
H01L23/04; H01L21/60; H01L23/02; H01L23/12; H01L29/861; (IPC1-7): H01L29/91