Document Type and Number:
Japanese Patent JPS5051679
Kind Code:
A
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Application Number:
JP10091273A
Publication Date:
May 08, 1975
Filing Date:
September 07, 1973
Export Citation:
International Classes:
H01L27/04; H01L21/822; H01L27/10; H01L29/93; H01L29/94; (IPC1-7): H01L27/10; H01L29/93