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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5057175
Kind Code:
A
Application Number:
JP10382873A
Publication Date:
May 19, 1975
Filing Date:
September 17, 1973
Export Citation:
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International Classes:
H01L21/28; H01L21/283; H01L21/44; (IPC1-7): H01L21/44; H01L23/54