Document Type and Number:
Japanese Patent JPS5057926
Kind Code:
A
Application Number:
JP10311573A
Publication Date:
May 20, 1975
Filing Date:
September 14, 1973
Export Citation:
International Classes:
C23C18/30; (IPC1-7): C23C3/02
Domestic Patent References:
| JP44030850A | ||||
| JP45036037A | ||||
| JP46030562A |