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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5073581
Kind Code:
A
Application Number:
JP12205873A
Publication Date:
June 17, 1975
Filing Date:
October 30, 1973
Export Citation:
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International Classes:
H01L21/76; H01L21/265; (IPC1-7): H01L21/265; H01L21/76
Domestic Patent References:
JPS472519A1972-02-07
JPS472520A1972-02-07
JPS472521A
JPS4736871A



 
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