Document Type and Number:
Japanese Patent JPS5093785
Kind Code:
A
Application Number:
JP138874A
Publication Date:
July 26, 1975
Filing Date:
December 21, 1973
Export Citation:
International Classes:
G01L1/18; G01L1/22; H01L29/84; H01L41/08; (IPC1-7): H01L41/08; G01L1/22
Domestic Patent References:
| JP46011395U |