Document Type and Number:
Japanese Patent JPS51121460
Kind Code:
U
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Application Number:
JP3848875U
Publication Date:
October 01, 1976
Filing Date:
March 24, 1975
Export Citation:
International Classes:
H01L21/52; H01L21/603; H01L29/40; (IPC1-7): H01L29/40; H01L21/603