Document Type and Number:
Japanese Patent JPS51131940
Kind Code:
U
More Like This:
JP2020066071 | MEMS ELEMENT |
JP2012039197 | ELECTROMECHANICAL CONVERSION DEVICE AND MANUFACTURING METHOD OF THE SAME |
Application Number:
JP5118775U
Publication Date:
October 23, 1976
Filing Date:
April 17, 1975
Export Citation:
International Classes:
H04R19/00; H04R19/02; (IPC1-7): H04R19/02